Vacuum Technology for a Better Global Environment. Measures against PFC Emissions Reduction from Semiconductor Manufacturing Equipments.

Pfc Emissions from Primary Aluminium Production

The primary aluminium production process has been identified as the largest anthropogenic source of emissions of two perfluorocarbons (PFCs): tetrafluoromethane (CF4) and hexafluoroethane (C2F6). Primary aluminium is produced using the Hall-Héroult electrolytic process, where the smelting pot itself acts as the electrolysis cell during the reduction process. When the alumina ore content of the ...

Simulation Environment for Semiconductor Technology Analysis

A programmable simulation environment for semiconductor technology analysis is presented. The SIESTA project sets out to combine the advantages of a comfortable, intuitive visual user interface with the flexibility and versatility of a high-level programming language. It is designed to provide a set of framework services to ensure a straight-forward definition of complex technology analysis tas...

Plasma Technology for Removal of Pharmaceutical Compounds from the Environment

A Framework for Semiconductor Manufacturing

Reduction of Waste in Semiconductor Manufacturing Plant (Sulfuric Acid Recycling Technology)

Technologies to collect and reuse sulfuric acid waste is attracting attention to reduce industrial waste in semiconductor manufacturing plants. Reusing sulfuric acid has a high economic value. By using sulfuric acid recycling equipment based on an atmospheric distillation method, we evaluated the recovery percentage of sulfuric acid, the concentration and quality of recycled sulfuric acid, and ...